采用DMD并行输入的激光干涉直写方法

A Way of Parallel Interferential Laser Direct Writing With DMD

基于HoloMaker-IV激光干涉直写系统的数字微反射镜(digital micro-mirror device,DMD)并行输入光刻方式,提出了根据图形特性的智能边界处理,实现了超高分辨率图像的高效激光直写干涉光刻。通过DMD输入图形与系统干涉控制参数相互匹配处理的方式对256色位图进行了图形格式转换,从而支持2D/3D,3D光变图像以及各种微图形文字的处理,为高效率制作高品质光变图像提供了新方法。实验表明:在2400DPI分辨率下,该方法比传统逐点光刻法的运行效率提高90倍。给出了高质量的实验结果。

The intelligence border method according to the figure character is mentioned and the strong laser direct writing of the super high definition figure is accomplished by the DMD of parallel laser direct writing method which is on the basis of HoloMaker-IV.The figure style of the 256 bmp is assembled according to the method of coupling the DMD input figure and the system interaction parameter.So the 2D/3D,3D optical variable device and many kinds of method dealing of the microscopic figures and words are advocated,so the new method is applied for making the delicate figure efficiently.It′s approved by the experiment that under the 2400 DPI definition,this method is more efficient by 90 times than the traditional optical lithography dot by dot.The high-quality experimenter result is also given by the new method.