二维正交光楔列阵大焦斑均匀照明光学测试系统的研究

A Testing System for Two Dimensional Orthogonal Segmented Wedge Array Applied to Uniform Illumination of Large Focal Spot

为了检测列阵式靶面均匀照明光学系统的聚焦特性，成功地开发了测定微米量级光强度起伏干涉斑纹投影放大的新技术。报道了测定聚焦光斑一维、二维大尺度不均匀性及小尺度干涉斑纹的实验方法、结果及误差分析。

A new projection technique for measuring the intensity undulations by interference speckles caused in the micrometer magnitude has successfully been developed, in order to test the focal property of optical array system for uniform illumination. The experimental method, measurement results and error analysis for testing the large scale non uniformity of 1 D and 2 D focal spot and interference speckles of the small scale have been presented.