列阵均匀照明系统的优化设计

OPTIMIZATION DESIGN OF THE OPTICAL ARRAY UNIFORM ILLUMINATION SYSTEMS

结合理论分析和神光系列装置均匀照明系统的设计和实验经验，从光的衍射、干涉与光束质量等角度分析了由透镜或衍射光学元件组成的列阵大焦斑均匀照明系统参数与靶面焦斑强度分布的关系，提出了列阵系统的优化设计方法。

Combining with theoretical analysis and the experiences of the designs and experiments of the uniform illumination systems of SHEN-GUANG serial facilities, the optical array uniform illumination systems consisted with lenses or diffractive optics elements were analyzed in the points of views of diffraction, interference and laser beam qualities. The optical array uniform illumination systems' optimization design methods were suggested.