ICF分解实验中的平面调制靶

SURFACE PERTURBATION TARGET FOR THE RESOLVED EXPERIMENTS OF INERTIAL-CONFINEMENT FUSION EXPERIMENTS

介绍采用多次电镀Ｎｉ图形转移工艺将激光干涉法获得的耦合在光刻胶表面的起伏图形进行复制以获得Ｎｉ基图形转移模板，并进一步将表面起伏图形复制到聚苯乙烯薄膜的表面，以获得具有表面起伏图形的平面调制靶。为提高图形转移的精度、研究电镀图形转移工艺和聚苯乙烯薄膜图形复制工艺对表面起伏图形转移精度的影响，以扫描电子显微镜对整个图形转移流程进行监控，比较光刻胶表面图形，一次、二次电镀转移图形和转移到聚苯乙烯上图形的形貌。

The surface perturbation target is an important experimental target for the resolved experiments of inertial-confinement fusion (ICF). In this paper, figure-transfer process by means of nickel-electroplate was adopted, through this process the sine perturbation figure which was prepared by laser interference was transfered and the Ni-plate with sine modulated perturbation figure was obtained. Further, thermal-press process was used to copy figure on the surface of polystyrene-film. To improve precision of figure-transfer process, Ni-electroplate process and thermal-press process were studied. The sine perturbation figure obtained through every process in figure-transfer were kept watch on by SEM .