基于精简标准单元库的OPC复用技术

OPC Reuse Based on a Reduced Standard Cell Library

提出了一种对标准单元的光学邻近效应校正结果进行复用的方法,并通过将传统标准单元中的所有核心逻辑通过反相器和二选一多路选择器的组合来实现,得到了一套可制造性强的精简标准单元库,从而使OPC复用技术得以有效实施,并将在很大程度上提高芯片生产效率和降低掩模数据存储量.精简标准单元库中单元的电气仿真结果表明其在面积、速度、功耗方面与传统标准单元库相比性能损失很小.

This paper presents a method for reusing the results of standard-cell-based OPCs. For this purpose,a reduced standard cell library composed of an inverter and MUX2 is constructed to realize the core logic of a traditional standard cell library. This library is manufacturing-friendly, and the reuse of its OPC results can improve the efficiency of chip manufacturing greatly and highly reduce the need for large storage. The electrical simulation results of the library also show that its increase in area,delay,and power is minor compared with traditional standard cell libraries.