大口径平面和非球面光学表面的纳米和纳弧度精度的测量--长行程外形仪的原理应用和发展

Nanometer and Nanoradian Accuracy Measurement of Large Scale Plane and Asphere——Principle, Applications and Development of Long Trace Profiler

由于同步辐射光学发展的需要,发展了长行程外形仪。长行程外形仪是一个可以达到纳米和纳弧度灵敏度和精度的小角度和表面外形的测量仪器,适用于大口径光学表面的高精度测量。可测量的面形除了平面、球面外,还有所有非球面,如圆柱面、圆锥面、抛物面、椭球面、双曲面、超环面、各种旋转面和其他非标准非球面。介绍了长行程外形仪的原理、应用和各种不同用途的长行程外形仪,包括实验室专用长行程外形仪、扫描五角棱镜长行程外形仪、在线测量长行程外形仪和便携式长行程外形仪、垂直扫瞄长行程外形仪、多功能长行程外形仪和纳米光学机。还介绍了长行程外形仪的精度和最新发展趋向,如提高测量精度的方法,大幅度地增加外形仪的测量范围和方便地进行二维零件测量等。

Due to the measurement requirements of synchrotron radiation optics, Long trace profiler （LTP） was developed. The LTP is a precise measurement instrument of small angle and surface profile with nanometer and nano-radian sensitivity and accuracy. It is suitable for high accuracy test of large- scale optics. In addition to plane, sphere, the LTP can test surface of cylinder, conic, toroid, ellipsoid, hyperboloid, different kind of rotary surfaces and no standard asphere. The principle, applications of the LTP and different kind of LTPs, including specialized laboratory LTP, scan penta-prism LTP （PPLTP）, in situ measurement LTP （ISLTP）, vertical scan LTP （VSLTP）, multiple functiuons LTP （LTP-MF） and the nano-optic-measuring machine （NOM）, are introduced. The accuracy consideration and new development tendency of the LTP, like that to raise measurement accuracy, to increase the measurement range and to make two-dimensional surface measurement are discussed. Several measurement results made in different countries are introduced.