涡轮MOCVD技术中有机源高速均匀混合

HIGH SPEED MIXING OF THE PRECURSOR MATERIALS IN TURBODISK MOCVD SYSTEM

在用于发光器件制造的多层ＭＯＣＶＤ外延技术中，用高速氢气流冲洗管路、混合有机源获得晶格匹配好，而且界面过度层薄的突变异质结界面．

nterface structure of the epitaxial layers were improved by high speed hydrogen push flow to accelerate the mixing of the precursor materials and by adjusting the partial injected pressure to the tube connected to the reaction chamber. A typical pressure layout is given.