仿日型砷化氢发生装置效果评价

EVALUATION OF JAPAN TYPE ARSINE GENERATOR

对仿日型和常用型砷化氢发生装置的测砷效果进行了实验研究。结果表明：仿日型测砷装置得出的数据变异程度小、重复性高、吸收效果好，并且克服了常用型砷化氢发生装置需逐个加锌粒，致使反应时间不易掌握的缺点。

Japan type arsine generator was compared with the ordinary arsine generator experimentally. It was found that the Japan type was superior to ordinary arsine generator in many respects. Data obtained fronl Japan type gave lesser variation coefficient, showed close data in repeating, and gave better absorption efficiency than that of the ordinary type. Furthermore Zinc granules had to be added frequently in ordinary arsine generator while Japan type did not need, therefore controlling reaction time easier.