金属薄膜力学性能压痕法的有限元分析

An Analysis of Finite Element Method for Indentation Method of the Metallic Film Mechanical Property

目的为了更精确地计算Si基金属薄膜材料中金属薄膜的弹性模量,提出一种新的计算方法.方法对Si基体铜薄膜在圆柱压头压入过程中的力学行为进行有限元模拟.结果通过多次迭代计算,得到了两种压头情况下,基体的弹性模量和金属薄膜弹性模量之间的关系曲线.结论这两条曲线的交点就是基体材料和金属薄膜材料的弹性模量.通过计算表明了有限单元法计算弹性模量的方法在纳观情况下同样适用,解决了必须依靠实验才能计算金属薄膜弹性模量的问题.

To a more precise calculation of silicon metal in the metal thin film materials elastic modulus of the film, a new method of calculation. Si matrix thin film of copper cylinder pressure in the first indentation in the process of mechanical behavior of finite element simulation. Through multiple iteration, the two radius have been under pressure head size, the matrix of elastic modulus and the elastic modulus of thin metal film of the curve. The intersection of these two curves is the matrix material and metal thin film materials modulus of elasticity. Test to determine the elastic modulus of satisfaction in the way of circumstances applies equally to resolve the experiment must be calculated on the elastic modulus of thin film metal issues.