二维微动工作台的设计与分析

Design and Analysis of 2-D Micro Displacement Worktable

设计了一种用于宏微双重驱动系统的二维微动工作台。该微动平台采用柔性铰链支撑的并联式设计结构,该结构比串联式结构更简单紧凑,其x方向和y方向完全对称,所以这两个方向的参数完全相同,便于参数识别与工作台控制;采用有限元方法对该工作台进行了静态分析,并与采用解析法计算的结果进行对比。推导出由于宏动工作台高加速运动而引起微动工作台振动的加速度公式,为研究宏动台高加速、高减速运动对微动工作台的影响提供了依据。最后,计算分析了宏动工作台典型运动情况对微动工作台的影响,分析表明选择合适的阻尼比ξ,可以获得较短的微动工作台系统的调整时间和较小的超调量。

A 2-D micro displacement worktable （MDW） used for the macro-micro dual-drive ultra-precision positioning system was designed. This MDW which sustained by flexure hinge used the structure of parallel strategy. This structure has advantages of single and compact structure compared of series-wound structure, It has symmetrical of x and y direction, so that the parameters in the two directions are all the same. So, it is convenient to identify parameter and easy to control. FEM was used to analyze the static state and the result was compared by using the analytical method. The MDW has vibration because of the motion of macro worktable. The acceleration formula of the MDW vibration was deduced, which provides the formula support for the research of the effect of MDW as the macro worktable works with high acceleration. The effect of MDW was computed and analyzed as the macro worktable works at a typical case. The result shows that shorter adjusting time and smaller overshoot can be obtained in the MDW system, if suitable damping ratio value was selected.