CCD精密测角系统

CCD Precision AngleMeasuring System

本文提出了一个由线阵ＣＣＤ、８０３１单片机和多面镜构成的可在３６０°内实现高精度角位移测量的系统，对其构成原理、可达精度及影响精度的因素进行了理论分析。解决了常见ＣＣＤ位移测量系统中量程和精度成反比的限制，实现了整个圆周上０．０１ｍｒａｄ的高精度测量。

A 360° high precision angular displacement measuring system consisting of linear CCD,8031 singlechip microcomputer and polygonal mirror is put forward in the paper.Its constitution principle,realizable accuracy and the affecting accuracy factors are analyzed in theory.The inverse proportional limitation between the measuring range and accuracy of the common CCD displacement measuring system has been solved.The high precision measurement of 0.01 mrad has been realized along the whole periphery.Subject terms CCD image sensors,Angle sensors,Displacement sensors,Angle measurement.