采用CCD拼接技术的外径测量研究

Research on Diameter Measurement with Charge Coupled Device Assembling Techniques

本文介绍了采用光学成象法，以拼接ＣＣＤ为光电接收器的外径测量系统的原理及其结构。系统测量直径范围２～１２ｍｍ，测量不稳定度小于１μｍ。

The principle and structure of the diameter measuring system.to which the optical imaging method is applied and the assembled CCDs are used as photoelectric detector,are presented in the paper.The diameter measurement of the system is within the range of φ2~φ12mm,The measuring unstability is less than 1μm and the measuring error is witin the range of ±2μm.