超声波电机二维精密控制系统研究与实现

Research of Ultrasonic Motor Z-dimensional Proecision Control System

采用超声波电机驱动的二维精密控制系统利用超声波电机的低速大转矩、响应快、断电自锁等特性,直接驱动二维精密平台,可获得很高的位移分辨率。利用上位机、DSP和编码器组成的闭环控制系统通过改变超声波电机驱动信号的调频实现精密控制。研制的二维平台以一对直径为60 mm的超声波电机作为驱动元件,采用2 500 p/r编码器可获得100 nm的位移分辨率。

A two-dimensional precision control system driven directly by a couple of ultrasonic motors （φ60 mm） was developed in this paper. A very high displacement resolution can be obtained by using the characteristic of ultrasonic motor such as high torque at a low speed, no input self lock and fast response. The closed loop control system which is composed of PC, DSP controller and encoder alternates the driven frequency to realize precision control. The displacement resolution of the system can reach 100 nm utilizing 2 500 p/r encoder.