摘要
通过对微分干涉相衬显微定量测量方法进行研究,提出了一种更有效的相位分析法。即在不对双光束干涉光路进行改造或处理的前提下,通过对光学成像进行处理而得到理想的结果。即把图像中的光强信号转变成相位信号,并通过维纳滤波对噪声进行了消除,最后获得表面微观形貌定量参数。
A more effective phase analysis method is proposed through the research on differential interference contrast （DIC） microscopy method for quantitative measurement. Without changing of the two light beam interference path of rays, the ideal result is obtained by processing of optical imaging. Transforms the luminous intensity signal into the phase signal, and eliminates the noise by Wiener filter. At last, the quantitative parameter of surface topography is obtained.
出处
《光学仪器》
2008年第2期17-20,共4页
Optical Instruments
关键词
微分干涉相衬(DIC)
定量测量
维纳滤波
相位分析法
differential interference contrast （DIC）
quantitative measurement
Wiener filter
phase analysis
