纤维基ZnO/Ag/ZnO多层膜的制备、结构及性能研究

Deposition and Properties of ZnO/Ag/ZnO Multi-Layers on Polyethylene Terephthalate Fiber Substrate

利用射频磁控溅射法,室温下通过交替溅射ZnO和Ag,在PET纤维基材上制备ZnO/Ag/ZnO纳米结构多层膜。运用扫描电镜和原子力显微镜对薄膜表面形貌进行分析,用分光光度计测试其透光性能,用四探针电阻测试仪测试其方块电阻。结果表明:纤维基ZnO/Ag/ZnO多层膜致密、均匀,对紫外光表现为较强的吸收能力;Ag膜厚度的改变可以调控多层膜的光电性能;ZnO(40 nm)/Ag(20 nm)/ZnO(40 nm)多层膜呈现多晶结构,方块电阻为4.4Ω;透光率接近30%。

The nano-structured, ZnO/Ag/ZnO multi-layers were deposited by magnetron sputtering of Ag and ZnO targets,sequentially,on polyethylene terephthalate（PET） fiber substrates. The fairly uniform, smooth and compact multilayers obtained show strong absorption of ultraviolet light. Its microstructures and physical properties were characterized with X-ray diffraction（XRD）, atomic force microscopy（AFM） scanning electron microscopy（SEM） and ultraviolet visible light spectroscopy（UV-Vis）. The results show that variations in the thickness of the Ag layers significantly control the electro-optical properties of the multi-layers. Under judicious choice of growth conditions, the ZnO（40 nm）/Ag（20 nm）/ ZnO（40 nm） polycrystalline multi-layers have a sheet resistance of 4.4Ω, an averaged transmittance of approximately 30% in the visible light range.