摘要
微透镜阵列是Hartmann-Shack波前探测器的核心元件之一。本文从理论上分析了微透镜阵列的性能对Hartmann-Shack波前探测器的波前探测精度的影响,并根据理论分析进行了一系列实验,得到了有益的结果。理论分析和实验结果表明:在微透镜阵列的焦距和孔径大小一定时,提高微透镜阵列的能量利用率和成象质量,可以提高Hartmann-Shack波前探测器的波前探测精度。
Microlens array is one of the key components of the Hartmann Shack wavefront sensor.The effects of the performances of the microlens array on the sensing accuracy of Hartmann Shack wavefront sensor are analyzed in the paper in theory.A series of experiments have been carried out according to the theoretical analysis and some profitable results have been achieved.The theoretical analysis and the experimental results show that when the focal length and aperture of the microlens array are constant,the sensing accuracy of Hartmann Shack wavefront sensor can be improved through the improvement of the power utilization ratio and the imaging quality.
出处
《光电工程》
CAS
CSCD
1997年第6期1-6,共6页
Opto-Electronic Engineering
基金
863高技术研究计划资助
关键词
波前探测器
哈特曼法
阵列透镜
波前探测
Wave front sensors,Array lenses,Hartmann method,Wave front detection.