微透镜阵列对Hartmann-Shack波前探测器探测精度的影响

Effects of Microlens Array on the Sensing Accuracy of Hartmann Shack Wavefront Sensor

微透镜阵列是Ｈａｒｔｍａｎｎ－Ｓｈａｃｋ波前探测器的核心元件之一。本文从理论上分析了微透镜阵列的性能对Ｈａｒｔｍａｎｎ－Ｓｈａｃｋ波前探测器的波前探测精度的影响，并根据理论分析进行了一系列实验，得到了有益的结果。理论分析和实验结果表明：在微透镜阵列的焦距和孔径大小一定时，提高微透镜阵列的能量利用率和成象质量，可以提高Ｈａｒｔｍａｎｎ－Ｓｈａｃｋ波前探测器的波前探测精度。

Microlens array is one of the key components of the Hartmann Shack wavefront sensor.The effects of the performances of the microlens array on the sensing accuracy of Hartmann Shack wavefront sensor are analyzed in the paper in theory.A series of experiments have been carried out according to the theoretical analysis and some profitable results have been achieved.The theoretical analysis and the experimental results show that when the focal length and aperture of the microlens array are constant,the sensing accuracy of Hartmann Shack wavefront sensor can be improved through the improvement of the power utilization ratio and the imaging quality.