摘要
在移相干涉测量中存在着移相器的移相误差,这对测量结果的精度有很大的影响。提出了消除移相器线性误差的五帧算法,使用该算法对五帧干涉图像进行处理。使用MATLAB软件针对移相干涉测量过程进行了模拟仿真。仿真结果表明,该算法在相位提取过程中可以消除移相器的线性误差因子,并对于常见的高斯噪声影响不敏感,从而提高了表面形貌测量精度。
In phase shifting measurement phase shifting error of phase shifter exists. It has great influence to measurement result. Five-frame phase stepping algorithm eliminating linear phase-stepping error is given to deal with five-frame interferagrams. Using software of MATLAB to simulate process of measurement, the result of simulation indicates the algorithm mentioned can eliminate phase shifting error of phase shifter. The result is insensitive in Gauss noise. The algorithm can improve the measurement accuracy.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2008年第3期398-400,共3页
Optical Technique
关键词
光学测量
移相干涉算法
消除线性误差
optical measurement
phase-shifting algorithm
eliminate linear error
