VC＋＋实现电子束曝光专用数据格式文件

THE EXPOSURE DATA FORMAT FOR E-BEAM LITHOGRAPHY REALIZED BY VC++

电子束曝光数据格式是针对电子束曝光系统设计的、可被曝光机直接识别的一种专用电子束曝光图形数据格式。利用VC++开发环境实现了该格式文件的创建,主要包括曝光版图的图形绘制、属性设置、结构体引用以及文件保存。实验结果表明,利用此软件可创建满足各种需求的曝光版图文件,从而便于进行电子束曝光的相关实验。

The exposure data format is designed with the requirement of electron beam lithography system, The implementation method is introduced based on the VC ＋ ＋ environment. The implementation process includes graphics drawing, properties setting, structure citing, and file saving, The experimental results show that exposure files meeting different requirements can be created by this software for e-beam lithography experiments.