摘要
针对光刻机媒质远传温控系统的大惯性、多重时滞和多重扰动特征,提出了双输入双输出多模态非线性PI控制算法来提高温控过程的收敛速度和稳态精度。算法将温控系统从启动到稳定划分为5个控制模态,下层采用非线性PI算法实现精确控制,上层利用智能决策实现多模态的选择和切换。该算法已被成功运用于光刻机投影物镜温度控制系统中,实现了投影物镜温度控制的快速收敛,使光刻机在±0.006℃范围内稳定工作,对比实验进一步显示该算法具有较强的鲁棒性和自适应性。
A two- input two- output nonlinear PI algorithm was presented to improve the convergent speed and steady-state accuracy of the temperature control system for projection lens, which had the characteristics of big inertia, multi-time-delay and multi-perturbation. Control process was divided into five phases from start to stability according to the ideal dynamic response curve. Improved PI algorithm was applied to precise by adjust and intelligent decision realizes choice and switch of the multi-model. This algorithm is used in the temperature control system of projection lens of optical lithography and has achieved quick convergent speed and ±0. 006℃ temperature stability. The contrast experimental results show that the algorithm has strong robust and self-adaptive.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2008年第10期1135-1139,共5页
China Mechanical Engineering
基金
国家重点基础研究发展计划资助项目(2003CB716206)
国家863高技术研究发展计划资助重大项目(2002AA4Z3000)
关键词
温度控制
PI算法
多模态
智能决策
双输入双输出
temperature control
PI algorithm
multi-mode
intelligent decision
two-input two- output
