摘要
研究了离子束加工系统的后置算法和误差补偿等问题。基于DH矩阵法,建立了系统的运动学方程,分析了工艺中离子源和工件的安装误差以及离子源相对于工件的六项对刀误差对加工定位的影响,建立了误差模型。在求解运动学方程时引入纠补矩阵,以消除离子源确定性的安装偏差对切平面定位误差的显著影响。补偿后的误差分析表明:切平面误差模型对对刀和安装精度提出要求后,靶距误差和入射角度误差同时也受到了限制,对加工的影响可以忽略不计。
The postalgorithm and error compensation were discussed. The direct kinetic algorithm of KDIFS-500 was set up based on DH method, and followed by the error model with respect to positioning errors and assemble errors of ion source and workpiece. The prominent influence of the deterministic assembly error of the ion source in the tangent plane would be canceled with an error compensation matrix. Thorough analysis of the error model with compensation matrix, it is indicated that the influence of the positioning error along the trajectory of the ion beam and that of the incidence angle error on the figuring process can be ignored with the constraints applied by satisfaction with the demand of the positioning error in the tangent plane.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2008年第10期1213-1218,共6页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50375155)
关键词
离子束加工
后置算法
误差模型
误差补偿
ion beam figuring
post-algorithm
error model
error compensation
