摘要
悬浮转子陀螺具有精度高的潜在优点,并可同时测量二轴角速度和三轴加速度。它可分为静电悬浮转子与磁悬浮转子陀螺两种类型。本文就国内外研究的磁悬浮转子陀螺的各种结构及其工作原理、工艺和性能特点进行了阐述,特别是对磁悬浮转子微陀螺发展的最新进展作了较详细的介绍。
The suspended spinning wheel gyroscope has a potential advantage of high precision; in addition, it can survey 2 axes of angular rate and 3 axes of acceleration simultaneously. Two kinds of gyroscopes exist, which are electrostatically suspended spinning wheel gyroscopes and magnetically suspended spinning wheel gyroscopes. In this paper, the respective characteristics of various structures, operating principles, fabrication processes and performances of magnetically suspended gyroscope developed in the world are summarized, especially the magnetically suspended MEMS gyroscopes are described in detail.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2008年第5期1115-1120,共6页
Chinese Journal of Scientific Instrument
关键词
磁悬浮技术
微机械陀螺
超导陀螺
微机电系统
magnetic levitation technology
micromachined gyroscope
superconducting gyroscope
micro-electromechanical system （MEMS）
