NiTi非晶薄膜的径向分布函数及结构分析

RADIAL DISTRIBUTION FUNCTION AND THE STRUCTURE ANALYSIS OF AMORPHOUS NiTi FILM

径向分布函数(RDF)是描述非晶态材料结构的重要工具,一般是通过对衍射强度的解析计算得到的。RAD程序是根据非晶材料X射线衍射数据计算其径向分布函数的集成程序。介绍了该程序的结构和应用方法,并采用RAD程序计算了采用磁控溅射法制备不同成分NiTi合金的径向分布函数,利用径向分布函数计算了非晶微结构参数。结果表明非晶薄膜中钛含量不同影响了非晶微结构参数。

Radial distribution function （RDF） is a important tool to demostrate the microstructure of noncystalline solid. It is usually get from analysising the diffraction intesity of noncrystalline solid. RAD is a integrated programe to calcualted RDF from diffraction data. The main part of programe and the main step were introduced. The radial distribution function of NiTi film with different composition were calculated by RAD. The microstructure parameter of amorphous film was obtained from the analysis of the radial distribution function. The result show that microstructure parameter of amorphous NiTi was influence by the content of Ti.