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A dynamic macromodel for distributed parameter magnetic microactuators

A dynamic macromodel for distributed parameter magnetic microactuators
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摘要 This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions. This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第5期1709-1715,共7页 中国物理B(英文版)
基金 supported in part by the National High Technology Research and Development Program of China (Grant No2006AA04z302)
关键词 magnetic microactuator macromodel microelectromechanical systems (MEMS) magnetic microactuator, macromodel, microelectromechanical systems (MEMS)
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参考文献18

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