摘要
为了满足反射镜较高的面形精度要求,提出了一种基于有限元分析的柔性支撑结构。首先根据反射镜的设计要求确定柔性支撑的结构形式,然后利用有限元分析软件对反射镜组件进行网格划分并提交运算。分析结果表明,当柔性支撑中镶嵌件膜片厚度为1.5mm、柔性杆十字槽厚度为4mm时,反射镜组件的一阶谐振频率达到206Hz,在1g重力作用下镜面综合面形误差RMS值分别达到2.5nm、4.4nm、25.3nm,在1g重力和4℃温升共同作用下镜面综合面形误差RMS值分别达到15.2nm、17.7nm、28.5nm,各项指标均满足设计要求。动力学响应分析表明,柔性支撑具有较强的抗振能力。
In order to meet the increasingly high accuracy of the mirror, a flexible support structure was proposed by the finite element analysis. According to the design requirements of the mirror, the flexible supporting structure was designed, then the finite element analysis software was used to mesh and submit the operator. The results showed that the one order resonant frequency could reach 205 Hz; RaMS of the integrated surface error of the mirror in the effects of gravity may get to 2.5 nm, 4.4nm, 25.3nm, and RMS of the integrated surface error of the mirror in the effects of gravity and temperature may get to 15,2nm, 17.7nm, 28.5nm, respectively; when the membrane thickness of the inlaid pieces was 1.5 mm, the thickness of crusaders groove was 4 mm, and all targets were met the design requirements. What＇s more, the vibration experiments conclude that this flexible support has a strong capability of anti-vibration.
出处
《长春理工大学学报（自然科学版）》
2008年第1期49-52,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
反射镜
柔性支撑
有限元
mirror
flexible supporting
finite element
