摘要
把光学非接触、高精度的测试技术与电子图像细分(像素)技术相结合,把光电检测方法和计算机数字图象处理方法相结合,研制了显微CCD微机系统,编制了VC++测试和控制软件。利用该系统,实现了微小物体的非接触、高精度、自动测试,解决了微米加工技术中微小物体的尺寸测试问题。作为实例,测试了玻璃微珠(半径17～31 m)的球度。实验表明,通过增大测量显微物镜的放大倍率(例如10倍),测试系统可以满足1的精度要求。
In this paper, is the testing technology of optical non-contact and high accuracy with electronic image subdivision （pixels） technology is combined, and photoelectfical detection method with computer digital image processing method, a Microlens- CCD- Computer system is developed, and the program based on Visual C＋＋ is edited for controling and measuring. With this system non-contact, high accuracy and automatic measuring of micro- object is realized, also the size testing problem of micro-object is resolved in micron processing technology. As an example, the sphericity（radius 17-3 μm） of a glass bead is tested. The experimental results show that if we increase the magnification of the microlens （for example 10 ）, the measure accuracy of this test system will reach up to 10m.
出处
《长春理工大学学报（自然科学版）》
2008年第1期57-59,56,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
总装备部十一五预研基金
关键词
显微物镜
数字图像处理
微小物体
高精度
非接触
microscope
digital image processing
micro-object
high accuracy
non-contact
