注入B^+离子使Fe膜非晶化的CEMS研究

CEMS study of amorphization ef iron films by implanting B^+ions

用转换电子的Mossbauer谱(CEMS)技术研究了注入B^+离子后多晶Fe膜的非晶化过程。由Mossbauer谱的拟合参数得到了在离子注入层中的非晶产额和它的超精细相互作用参数。用剥层的方法研究了非晶相在注入膜中的分布。研究了退火对膜中各相的影响和晶化后的相。

The transformation of crystalline Fe films to amorphous alloy by implanting B+ ions was studied by using the technique of conversion electron Mossbauer spectroscopy. The analysis of fraction of amorphous phase and its hf parameters as functions of B+ ion dose and the phases formed after crystallization gives a new sight of the amor-phization mechanism.