气相沉积立方氮化硼薄膜的研究与发展状况

Status of Research and Development of Vapor Deposition of Cubic Boron Nitride Films

简述了立方氮化硼的优异性能、国内外研究立方氮化硼薄膜的历史、现状、应用前景及存在的问题.

The excellent properties of cubic boron nitride are described briefly. Tbe research history,present status and application prospects of cubic boron nitride films are reviewed. The existing problems are pointed out.