摘要
介绍了类金刚石膜的结构、制备方法和发展现状,综述了DLC膜的机械、电子、光学和生物学性能以及在这些领域中的应用状况。
The structures of diamond-like carbon (DLC) films, the deposition methods and development actuality of the films are introduced. The properties and applications of DLC in the fields of machinery, electronics, optics and medicine are reviewed.
出处
《工具技术》
北大核心
2008年第5期48-51,共4页
Tool Engineering
关键词
类金刚石膜
制备
性能
应用
diamond-like carbon film( DLC), preparation, property, application