Zn_2SiO_4微波陶瓷溶胶-凝胶法制备及性能研究

Preparation and Dielectric Properties of Zn_2SiO_4 Microwave Ceramics by Sol-Gel Method

以Zn(NO3)2.6H2O和正硅酸乙酯为前驱体,乙醇作为溶剂,采用溶胶-凝胶法制备了Zn2SiO4微波陶瓷粉体,并研究了粉体的烧结特性和微波介电性能。干凝胶在800℃热处理后得到的ZnO和Zn2SiO4纳米级混合粉体。溶胶凝胶法制备的粉体具有更大的比表面积,使作为粉体烧结驱动力的表面能剧增,促使陶瓷在1200～1350℃实现致密烧结,比固相法合成粉体的烧结温度降低近200℃,并具有优异的介电性能:εr=6.14,Qf=67,500GHz(12GHz)。

Using Zn（NO3）2-6H2O and TEOS as precursors, ethanol as solvent, the Zn2SiO4 microwave ceramic powders were prepared by sol-gel method. The sintering characteristics and microwave dielectric properties of the powders were also studied. The nano powder mixture of ZnO and Zn2SiO4 was obtained from dried gel after 800 ℃ heat treatment. The powders prepared by sol-gel method have a larger specific surface area, which improves the sintering process and the mixture powders were sintered well at 1200-1350 ℃, which was nearly 200℃ lower than the powders prepared by solid reaction. Excellent dielectric properties of εr=6.14, Qf=67,500 GHz （12 GHz） were obtained.