摘要
S型与W型是平面MEMS弹簧中两种典型的结构形式,各自结构特点导致了它们具有不同的力学性能。通过理论分析、仿真计算和实验验证方法对平面镍质S型与平面W型MEMS弹簧性能进行了比较研究,得出了在同样的外廓尺寸及相同的线宽、厚度和梁间距情况下,平面S型微弹簧的刚度大于平面W型微弹簧的刚度的结论,为MEMS弹簧的进一步优化设计提供理论参考。
S-form and W-form are two kinds of typical structure of planar micro-springs based on MEMS （Micro Electro-Mechanical Systems）, because of diverse form they have different mechanics features. This paper presents the study on comparative study on stiffness characterization of nickel planar S ＆ W-form micro-springs based on MEMS by theory analysis, tensile test and ANSYS Finite Element Method. The conclusion has been drown that the stiffness of a S-form micro-spring is stronger than that of W-form in the case of the same size of outline, feature, thickness and clearance, which is valuable for providing feasible directions to the optimization design and manufacture of the micro-spring.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第2期288-291,共4页
Chinese Journal of Sensors and Actuators
基金
中国人民解放军总装备部武器装备预研基金项目资助(51405040205BQ0101)
关键词
微机电系统
平面弹簧
刚度系数
有限元方法
Micro Electro-Mechanical Systems（MEMS）
planar spring
spring constant
finite element method（FEM）
