基于有限元法的激光横向刻蚀路径对片阻阻值影响的研究

The Influence of Laser Transverse Cutting on the Resistance of Chip Resistors Based on the Finite Element

应用激光对片阻阻值进行修调时,垂直于电流方向的横向刻蚀对片阻的阻值影响较大,合理设计横向刻蚀的起刻位置和刻蚀长度能够以较低成本提高激光调阻精度及调阻效率。应用有限元法可得激光横向刻蚀长度和横向起刻位置对片阻阻值影响的定性、定量结论。经实验验证:应用有限元法得到的横向刻蚀路径对阻值影响的定性结论与实验结论一致、定量结论的计算偏差不大于2%,能够为提高调阻精度和调阻效率提供控制依据。

The laser cutting,vertical to the current flow, called transverse cutting, makes the resistance increasing severely. Designing reasonably the transverse cutting the etch length and start initial position can improve the trimming precision at a low cost. Applying the finite element method, the dependence of resistance on laser transverse cutting is studied and qualitative anllysis and quantitative results are analysed. From experimental data they are validated that the qualitative results fit the experimental results, and the calculating error of quantitative results is less than 2%. These results can provide control basis for laser trimming process.