利用喷墨打印技术制备的类神经气体传感器

Inkjet Printed Gas Sensor for the Nerve Agent Stimulant Detection

利用喷墨打印技术沉积生物高分子溶液的方法,打印出金的梳状微电极的阵列图形,并采用NaX型沸石分子筛作为敏感膜,研制了探测神经类毒气沙林的相似物DMMP气体的阻抗型传感器。电极图形使用简单的绘图软件autoCAD画出,通过简单改进过的办公用喷墨打印机在金衬底上打印一层自组装膜的阻挡层,经过湿法刻蚀后得到了梳状微电极阵列。将制得的传感器对1ppm(即1×10-6)DMMP气体进行检测,测得在0.01Hz处,其电阻的相对变化值为10.7%。与传统MEMS工艺相比较,喷墨打印方法制备传感器具有工艺步骤简化,成本低,可在柔性等不同材料上制作等优点,有着广泛的应用前景。

An inkjet printed gas sensor based on zeolite film Nax is developed for the detection of the nerve agent sarin stimulant DMMP. The figure of the electrode can be designed with auto CAD. Self-assembled monolayers（SAMs） are printed on gold surface by a simply rebuilt office printer and the interdigitated microelectrode is obtained after wet etching. 1× 10^-6 DMMP gas is detected by the gas sensor and the normalized resistance can reach 10. 7% at 0. 01 Hz. Compared with traditional MEMS process, inkjet printing technology in fabricating sensors has extensive application with the advantages of simple processing steps, low cost and direct-write on flexible substrate.