基于SOI的三轴压阻微加速度计的设计

The Design of Three-Axis Accelerometer Based on SOI

为了解决现有三轴加速度计机械精度差的问题,提出了一种基于SOI的单质量块三轴压阻微加速度计。采用四边四梁结构,根据梁上扩散的压敏电阻在分别受到三个方向惯性力作用时变化量不同设计三个方向的惠斯通电桥,实现三维加速度矢量的检测。运用ANSYS软件对结构进行建模仿真,最后设计了一套可行的工艺流程。

In order to solve the problem that the mechanical precision of three-axis accelerometer is low now,a three-axis accelerometer based on SOI with single mass is introduced. The accelerometer has four beams and the three Wheatstone bridges are designed according to the variation of the resistors when the inertial force is acting on the structure , the resistors are etched at where the stress is maximal on the beam , so the bridges can detect the acceleration vector. The structure model is established and analyzed by using ANSYS software,at last a feasible technics process is designed.