压电折叠梁微执行器的低电压优化设计

Design Optimization of Piezoelectric Folded Cantilever Microactuators for Low Voltage Application

采用理论分析和有限元数值模拟相结合的方法,对压电折叠梁微执行器在低电压下工作时的器件结构进行优化设计。首先通过理论分析获得优化的器件结构参数,再通过有限元模拟验证理论分析结果。在器件设计中,通过综合考虑制造工艺、工作条件、器件应用的可靠性,对压电悬臂梁长度、单晶硅层厚度、折叠梁级数,以及工作电压进行折衷优化,获得低电压应用时最佳的器件参数。

Piezoelectric folded cantilever microactuators are optimized for low voltage application, with the combination of theoretical analysis and numerical FEM. Firstly, the optimal structural parameters of the device are obtained by theoretical analysis, then the theoretical results are verified through FEM simula- tion. In the course of designing, with the comprehensive consideration of fabrication process, applied conditions, reliability of the device, the optimal design is achieved with tradeoff among the length of piezoelectric beams, the thickness of single crystal silicon layer, the number of levels of folded cantilevers, and the applied voltage, with which the best parameters of the device are concluded for low voltage application.