光纤直接连接型MEMS光开关的设计方法研究

Study on Design Method of MEMS Optical Switch Based on Direct Fiber Actuation

仿真和实验研究了一种作为高功率激光能量续断器的光纤直接连接型MEMS光开关的设计方法,包括光纤对准误差对激光传能特性的影响、致动器的设计原则与基本性能指标。光纤对准误差中,横向偏移对耦合效率的影响较大,角度偏移的影响不明显。对比了芯径400μm光纤分别与芯径400μm、600μm光纤对接的耦合效率,证明芯径400μm光纤与芯径600μm光纤对接时的耦合效率对对准误差更加稳健。建立了光纤的等效悬臂梁模型,讨论了光开关中致动器的设计原则,论证了其基本性能指标。致动器的设计可以只考虑横向偏移对耦合效率的影响。

The design method of MEMS optical switch acting as high optical energy interrupter is investigated by simulations and experiments, it includes the influence of aligning irregularities on transmission efficiency, design methods and guide lines of actuator. The influence of transverse misalignment on the splice loss is more significant than angular misalignment＇ s. The coupling characteristics between fibers are investigated, when 400μm core diameter fiber connecting with 600 μm core diameter fiber, the coupling performance is steadier than that of 400μm core diameter connecting with 400μm core diameter fiber. The fiber cantilever beam model is made; the actuator can be well designed according to the transverse misalignment. The processing technical guidelines of fiber optical＇s micro actuator are investigated.