V型电热硅微致动器动态频率特性

Dynamic Frequency Characteristic of V-Shaped Electro-Thermal Actuator

提出了V型电热硅微致动器的弯曲振动力学模型。考虑到微米尺度上的硅梁难以简化为质量块、弹簧振动模型,采用了连续体建模,据此可进行其模态分析及动态频率特性的理论研究。利用自行设计制造的在线动态测试机构,测试了V型电热硅微致器在不同激励电压驱动下的响应输出,结果表明其位移输出也是随交变驱动电压的变化而非同步地发生变化。

A flexural oscillation model about V-shaped silicon electro-thermal microactuator is presented. Oonsidering difficult to simplify the structure as a mass and spring model, it is calculated based on the continuum medium theory. Using the on line dynamical testing structure, response output of the actuator experimented at condition of alternate voltage driving. The results demonstrated the output displace changed with the changing voltage.