摘要
介绍了He-Ne散射检测激光损伤的原理和实验装置,分析了散射信号及激光损伤的内在关系。实验表明,散射信号与薄膜的激光损伤尺度与形貌有关,对于本次实验,最小探测的激光损伤尺度为20μm左右。与显微镜和等离子体闪光法实验对比显示,He-Ne散射测量能判定薄膜激光损伤的发生,准确测量激光损伤阈值,测量结果与显微镜观察法符合较好。
The laser damage detection by He-Ne scattering is studied in details by using Nd： YAG damage testing system. The experiment result shows that the scattering signal can detect the coating dare.age, and the minimum detected size is up to 20 μm. Comparing with microscope and plasma spark, the results of damage threshold measured by scattering are well agreed with the method of microscope observation. The results show that HeiNe scattering technique is effective and reliable.
出处
《光学与光电技术》
2008年第3期22-25,共4页
Optics & Optoelectronic Technology
