阴极悬挂方式对电沉积金刚石-镍复合膜品质的影响

Influence of the hanging orientation of cathode to the electrodepositing of diamond-nickel composite film

给出了阴极悬挂方式对金刚石-镍复合膜电沉积结果的影响,指出:当阴极完全竖直悬挂时,复合膜中无金刚石颗粒沉积;而将阴极上部远离阳极倾斜悬挂时,则可得到有金刚石颗粒分布的复合膜。阴极倾角越大,复合膜中金刚石颗粒含量越高。倾角为45°时,复合膜中金刚石颗粒含量最高而且分布均匀。阴极悬挂方位对沉积复合膜的厚度均匀性有很大影响,电镀过程中阴极沿其自身平面平均间歇旋转90°后继续电镀,可以得到厚度均匀的复合膜。另外,采用扫描电镜(SEM)检测了复合膜中金刚石颗粒的含量和分布情况,采用数显电子测微仪测量复合膜的厚度,并对检测结果作了简要分析。

The influence of the hanging orientation of cathode to the electrodepositing of diamond-nickel composite film was shown in this paper. It was indicated that there were no any diamond grain in the composite film when the cathode was vertically hung in the electrolytic solution; But composite film which contained diamond grains was deposited when the cathode was hung on the condition of the top of the cathode inclined to the. anode. Further more, it was found that diamond grains content in the film increased with increasing of the obliquity of cathode and reached maximum when the obliquity was kept at 45 degree. The hanging orientation of cathode strongly affected the uniformity of the thickness of the film, and uniform films were deposited when cathode was intermittently circumrotated by 90 degree in the plane itself during deposition. On the other hand, scanning electron microscope （SEM） was used to measure the content and the distribution of diamond grains in the film, digital electronic micrometer was used to measure the thickness of the film, respectively. And the measured results were analyzed in this paper, too.