摘要
低温等离子体是空间主要环境之一,近年来被广泛应用于材料表面改性、能源、航空、环境科学及国防等方面。本文介绍了等离子体诊断的常用方法和适用范围。认为准确进行等离子体诊断取决于两大因素:一是测量准确度(灵敏度);二是测试系统对等离子体产生的扰动较小。
Low-temperature plasma, one of the main space environments, has been widely used in the area of surface modification of dielectric material, energy sources; aerospace, environmental sciences and national defence. This paper introduces the common methods and applicable range of the plasma diagnosis in details. It is thought that diagnosing plasma accurately lies on two factors, one is the accuracy of measurement（sensitivity）, the other is the test system has no disturbances on plasma.
出处
《电工材料》
CAS
2008年第2期46-50,共5页
Electrical Engineering Materials
关键词
等离子体
朗缪尔探针法
微波透射法
光谱法
plasma
langmuir probe
microwave transmission
spectroscopic method
