摘要
为解决多控制源空间分布系统的控制问题,在以往文献提出的空间模糊控制器的基础上,提出一种基于空间分解、局部协调的空间模糊控制策略,针对多控制源设计了具有协调功能的空间模糊控制器.以三区快速加热化学气相沉积反应器系统为例,对所提出的控制方法进行了仿真验证.仿真结果表明,该方法能取得更好的空间均匀性.
To solve the control problem of spatially-distributed systems with multiple actuators, a fuzzy control strategy with spatial decomposition and local coordination is proposed based on the existing literature. A spatial fuzzy controller is presented for multiple actuators, and then spatial fuzzy controllers with coordination function are designed. A rapid thermal chemical vapor deposition(RTCVD) system is taken as an example. The simulation results show that the proposed control method can achieve an excellent spatial uniformity.
出处
《控制与决策》
EI
CSCD
北大核心
2008年第6期709-713,共5页
Control and Decision
基金
国家自然科学基金项目(60774015,60604018)
高等学校博士点专项科研基金项目(20060248001)
关键词
三维模糊集
模糊控制
空间分布系统
Spatial fuzzy set
Fuzzy control
Spatially-distributed system