摘要
以正硅酸乙酯、异丙醇铝为先驱体,甲基三乙氧基硅烷为有机硅烷,采用溶胶-凝胶旋涂方法在普通玻璃和硅片表面镀制纳米复合薄膜。通过FT-IR、VIS透射光谱的分析及薄膜表面接触角的测量,研究了Al_2O_3与SiO_2配比和热处理温度对复合薄膜的化学结构、透光率及疏水性的影响。结果表明该薄膜具有疏水、致密、透明等性能;Al_2O_3的加入未降低复合薄膜的可见光透光率,其中经400℃热处理后不同配比复合薄膜在可见光区的透光率均大于85%,且不影响复合薄膜的疏水性。
Al2O3-SiO2 tetraethoxysliane（TEOS） and aluminium iso- propoxide as precursor. The addition of methyltriethoxysilane（MTES） in TEOS precursors produces a decrease of SiOH and Si-O- surface content. The nano-composite films are prepared by the sol-gel spin-coating method on the surface of glass and silicon chip. The influences of Al2O3 doping concentration and heat-treatment temperature on the chemical structure, light transmittance and hydrophobicity of the composite films are studied by the analysis of FT-IR, VIS-spec- tra and measuring the contact angle. The results indicate that the nano-composite films are hydrophobic, dense, trans- parent and scratch-resistant. The visible light transmittance is not decreased as Al2O3 doping. The average transmittance in visible region is greater than 85 % at the heat-treatment temperature around 400℃ and the hydrophobicity hardly changes.
基金
上海市教育委员会科研创新项目资助(08YZ97)
