摘要
利用非平衡磁控溅射技术溅射复合靶制备了一系列掺杂金属元素钛的类金刚石膜,并对薄膜的机械性能、沉积速率、电学性能及化学性能进行了测试,主要分析了影响机械性能、沉积速率的主要参数并确定了最佳工艺参数,同时阐述了其电学性能及化学性能结果。
Ti-contained diamond-like carbon films（Ti-DLC） are deposited by UBMS technology with composite targets. The mechanical and tribological properties, the desposition rate of films, electrical properties and its anti-erosion property are tested. The optimum parameters are determined through the test and analysis of the mechanical and tribological properties. Meanwhile, the results of electrical properties and anti-erosion property are shown.
关键词
非平衡磁控溅射
钛掺杂
复合靶
正交实验
unbalancd magnetron sputtering（UBMS）, Ti-doping, composite targets, orthogonal experiment
