气相传输平衡法在Sr^(2+)：α-BBO衬底上制备β-BBO薄膜的研究

Study on Fabrication of β-BBO Films on Sr^(2+)-doped α-BBO Substrates by Vapor Transport Equilibration Technique

采用气相传输平衡技术在掺Sr^(2+)的α-BBO(001)衬底上制备了β-BBO薄膜,研究了粉料配比、VTE处理温度以及恒温时间对薄膜质量的影响。结果表明,在适当的粉料配比、VTE处理温度以及恒温时间下,在Sr^(2+)α-BBO晶片表层制备呈c轴高度择优取向的、没有第二相物质的β-BBO薄膜,其双晶摇摆曲线半峰宽值FWHM为1000″,显示出β-BBO薄膜较好的结晶质量。并对气相传输平衡技术制备β-BBO薄膜的机理进行了初步的探讨。

Crystalline β-BBO films are successfully prepared on （00 1 ）-oriented Sr^2＋ -doped α-BBO substrates using the vapor transport equilibration technique. The effect of powder ratio, VTE treatment temperature and treatment time on the crystallinity of β-BBO films is studied. The results manifest that β-BBO films with highly （001） preferred orientation are obtained under proper powder ratio, VTE treatment temperature and time. The full width at half-maximum of the rocking curve for the films is as low as about 1000＂, which shows the high crystallinity of the films. Meanwhile, the mechanism of fabrication of β-BBO films by the VTE technique is discussed.