PID神经元网络在单晶硅提拉速度控制系统中的应用研究

Application Studies of PID Neurons Network in Monocrystalline Silicon Pulling Speed Control System

在单晶硅晶体生长中,提拉速度的控制直接影响单晶硅的质量,如何提高速度控制系统的动态响应速度和抗干扰性能,对提高晶体生长质量具有重要意义。本文通过分析晶体结晶过程的热量运输,得出了单晶硅提拉过程中影响其质量问题的主要因素,提出了将PID神经元网络应用于单晶硅提拉速度控制系统中的方法,形成PID神经元网络提拉系统,建立了基于MATLAB/SIMULINK下的PID神经元网络控制系统模型,通过仿真结果表明,该系统对改善单晶硅的质量具有一定的实际意义。

Pulling speed control directly impacts on the quality of monoerystalline silicon in the growth of Crystal. How to improve the dynamic response speed and a Anti-jamming performance of speed control system is of great significance to enhance the quality of crystal growth. By analyzing heat transport in crystal process, the paper identifies the main factors that will affect quality of monocrystalline silicon in the pulling process of monocrystalline silicon, puts forward the ways of how to apply PID neural network in monocrystalline silicon pulling speed control system, and founds the PID neural network control system model based on MATLAB/SIMULINK, to apply PID neural net work in monocrystalline silicon pulling speed control system is of practical significance through simulation results show