集成聚焦式测头的纳米测量机用于台阶高度标准的评价

Evaluation of Step Height Standard Using Nano-Measuring Machine Integrated with Focusing Sensor

利用集成聚焦式测头的纳米测量机实现了高精度的台阶高度标准评价,该系统的测量范围可以达到25mm×25mm×5mm。描述了纳米测量机的工作原理,通过内嵌激光干涉仪和角度传感器的实时测量与反馈,实现高精度定位与扫描。聚焦式测头只作为零点传感器,与3个激光轴交于一点,避免了阿贝误差影响。通过将聚焦式测头的输出信号引入到纳米测量机的数字信号控制器中,实现定位系统的辅助测量,减小了聚焦式测头的非线性对测量结果的影响。根据ISO5436-1:2000的评价方法对经过标定的台阶高度进行评价,14次测量的均方根(RMS)偏差为0.237nm。

Evaluation of step height standard with high accuracy is realized using a nano-measuring machine（NMM）integrated with a focusing sensor.The measuring range of the system is up to 25 mm×25 mm×5 mm.The operating principle of the NMM is described.NMM has high accuracy positioning and scanning performance through real-time measurement and feedback of built-in laser interferometers and angular sensors.The focusing sensor is only used as a zero point sensor,intersected at the same point with the three laser beams,which eliminates Abbe error.The output signal of the focusing sensor is introduced into the digital signal processing（DSP）controller of the NMM.The NMM will also measure data in z direction at the same time,which minimizes the influence of the focusing sensor＇s nonlinearity.According to the international standard of ISO 5436-1：2000,a calibrated step height is measured.The root-mean-square（RMS）deviation of 14 times measurements is 0.237 nm.