摘要
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关,并对其总体结构进行了设计与仿真分析。运用有限元分析的方法,设计了永磁体的最佳尺寸并优化了悬臂梁的结构;分析了聚酰亚胺悬臂梁的扭转力、电磁力与挠度的关系。当输入电流为75mA时,聚酰亚胺悬臂梁达到平衡时的挠度约为1.02mm,能够满足器件转换光路的要求。
A new polyimide（PI）-cantilever MEMS optical switch of electromagnetic actuation is proposed,and the structure of the optical switch is designed and simulated.The optimal dimension of the permanet magnet is designed and the structure of the PI-cantilever is optimized by finite element method.The relation of restoring force and electromagnetic force versus the displacement of the cantilever is interpreted.With 75 mA current pulse input,the distance of PI-cantilever equation is about 1.02 mm,which is able to change the propagation direction of the optical beam between through state and reflection state.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2008年第6期1151-1154,共4页
Acta Optica Sinica
基金
国家自然科学基金(60578036)
中国科学院“优秀博士学位论文、院长奖获得者科研启动专项基金”资助课题
关键词
微机电系统
光开关
有限元分析
电磁驱动
micro-electro-mechanical system
optical switch
finite element analysis
electromagnetic actuation
