脉冲激光沉积ZnO薄膜动力学过程模拟

Simulation of the dynamics process of pulsed laser deposition of ZnO thin film

利用有限差分法对脉冲激光沉积(PLD)技术制备ZnO薄膜过程中等离子体在等温和绝热两个阶段的速度演化进行了模拟,并给出了其中主要粒子在空间的具体演化规律,同时对等离子体在空间膨胀的物理机制进行了深入的讨论.

By finite difference method, the evolvement of plasma generated by a pulsed laser is studied for pulsed laser deposition of ZnO thin film. It has discussed the movement of particle in plasma in isothermal and adiabatic expansion stages in more detail. At the same time, the paper has simulated the change of plasma at different time. Moreover, the physics mechanism in expansion of the plasma has been explained.