线阵CCD在异形回转体轮廓尺寸测量中的应用

The Application of Lineary Array of CCD in Irregular 3 D

讨论利用线阵ＣＣＤ图象测量方法。配备Ｚ、Ｙ二维运动工作台及绕Ｚ轴回转数显工作台，对异形回转体三维轮廓尺寸进行检测。用Ｍａｒ边缘检测算子对ＣＣＤ获得的原始灰度图象进行处理，采取最小二乘法完成曲线拟合，获得亚象元分辨率。对Φ２００ｍｍ异形回转体零件进行尺寸测量，测量系统精度达到μｍ级。

An image metrology method using liner CCD camera is discussed in this paper.With the working table that could moves in Z、Y dimensions and rotates around the Z axis,the 3 D external profile of an irregular rotary object is detected.In order to get the sub pixel resolution,the original data image from CCD is processed by Marrs edge position detect algorithm,and the zerocross position is detected by the least square fitting method.In the mesurement of an irregular rotary part which has the size of Φ200 mm,the measure resolution of the detect system reaches the μm level.The result of experiment is also discussed.