台式软X射线近贴显微系统

A TableTop Soft XRay Contact Microscope

以小型化Ｎｄ：ＹＡＧ调Ｑ脉冲激光产生的高温等离子体作为软Ｘ射线源，采用软Ｘ射线近贴显微技术，建立了台式软Ｘ射线显微系统，得到了图像分辨率高于１μｍ的初步结果．

A table top soft Xray contact microscope was constructed by using a Qswitched Nd:YAG laserproduced plasma as the source of soft Xray radiation. The preliminary results with the contact micrograph resolution better than l μm were obtained.