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旋转载体用硅微机械陀螺的相位研究 被引量:2

Phase research of silicon micro-machined gyroscope using for rotating carrier
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摘要 介绍了利用旋转载体自旋作为驱动力的硅微机械陀螺的结构和原理,通过对陀螺相位的处理来判断载体的偏转极性。用重力加速度计信号反映载体自旋信号作为基准,通过比较陀螺信号和加速度计信号的相位,再除去两者相位差中所含的滞后值,进而可以判断载体在空间中实际偏转方向。 The structure and principle of silicon micro-machined gyroscope used for rotating carrier is introduced. By processing gyroscope phase, the deflecting polarity of the carrier can be judged. Using the gravity accelerometer signal, which reflects the carrier' s rotation information, as the benchmark, comparing with the output signal phase of the accelerometer and the gyroscope, then subtracting the lagged value from the two phases difference, we can judge the real deflecting direction of the carrier in the space.
出处 《北京机械工业学院学报》 2008年第2期1-4,共4页 Journal of Beijing Institute of Machinery
基金 国家自然科学基金项目(60627001) 北京市传感器重点实验室开放课题(KM200710772014)
关键词 旋转载体 硅微机械陀螺 相位 滞后值 rotating carrier silicon micro-machined gyroscope phase lagged value
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  • 1A.Kourepenis,张沛晗等.微机电系统(MEMS)惯性传感器的性能[J].惯导与仪表,2001(4):1-11. 被引量:2
  • 2周世勤 鲁政 孙道秋.微机械惯性仪表研制现状跟踪研究.航天情报研究报告[R].,2000.40—42.
  • 3MAENAKA K, SHIOZAWA T. A study of silicon angular rate sensors using anisotropic etching technology[J]. Sensors and Actuators A, 1994,43:72-77.
  • 4MIZUNO J, NOTTMEYER K, CABUZ Cleopata ,et al. Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceration and angular rate [C]. Sweden The 8th International Confence on Solid-State Sensors and Actuators, and Eurosensors Stockholm,1995: 679-682.
  • 5MAENAKA K, FUJITA T, KONISHI Y, et al.Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass [J]. Sensors and Actuatous, 1996,54: 568-573.
  • 6DEGANI O,Seter Dan J, SOCHER Eran, et al. Optimal design and noise consideration of micromachined vidrating rate gyroscope with modulated integrative differential optical sensing [J]. Journal of Microelectromechanical Systems, 1998,7 (3): 329-338.
  • 7Jorg R. Kaienburg, Ralf Schellin. A novel silicon surface micromachining angle sensor[J]. Sensors and Actuators, 1999, 71: 542-556.
  • 8Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funadashi, et al. Vibrating gyroscope consisting of three layers of polysilion thin film [J]. Sensors and Actuators, 2000, 82:114-119.
  • 9Yoichi Mochida, Masaya Tamura, Kuniki Ohwada. A micromachined vidrating rate gyroscope with independent beams for the drive and detection modes[J]. Sensors and Actuators, 2000,80:170-178.
  • 10Zhihong Li, Zhenchuan Yang,Zhixiong Xiao, et al. A bulk micromachined vidratory lateral gyroscope fadricated with wafer bonding and deep trench etching[J].Sensors and Actuators, 2000,83: 24-29.

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